Atomic layer deposition of ruthenium on titanium nitride surface: a density functional theory study

Phung, QuanQuanPhungVancoillie, StevenStevenVancoilliePourtois, GeoffreyGeoffreyPourtoisSwerts, JohanJohanSwertsPierloot, ChristineChristinePierlootDelabie, AnneliesAnneliesDelabie2021-10-212021-10-2120131932-7447https://imec-publications.be/handle/20.500.12860/22936Atomic layer deposition of ruthenium on titanium nitride surface: a density functional theory studyJournal articlehttp://pubs.acs.org/doi/abs/10.1021/jp405489w