Centimetre-scale micro-transfer printing to enable heterogeneous integration of thin film lithium niobate with silicon photonics

Niels, MargotMargotNielsVanackere, TomTomVanackereVandekerckhove, TomTomVandekerckhovePoelman, StijnStijnPoelmanReep, TomTomReepRoelkens, GuntherGuntherRoelkensBillet, MaximilienMaximilienBilletKuyken, BartBartKuyken2025-03-092025-03-092025-MAR 12159-3930WOS:001434575100004https://imec-publications.be/handle/20.500.12860/45363Centimetre-scale micro-transfer printing to enable heterogeneous integration of thin film lithium niobate with silicon photonicsJournal article10.1364/OME.551748WOS:001434575100004NITRIDECIRCUITS