Aarts, ArnoArnoAartsPereira Neves, HerculesHerculesPereira NevesPuers, BobBobPuersHerwik, StanislavStanislavHerwikSeidl, KarstenKarstenSeidlRuther, PatrickPatrickRutherVan Hoof, ChrisChrisVan Hoof2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/14857A slim out-of-plane 3D implantable CMOS based probe arrayProceedings paper