De Volder, MichaelMichaelDe VolderTawfick, SamSamTawfickPark, Sei-JinSei-JinParkHart, JohnJohnHart2021-10-192021-10-1920111936-0851https://imec-publications.be/handle/20.500.12860/18801Corrugated carbon nanotube microstructures with geometrically tunable complianceJournal article