Zhang, J.F.J.F.ZhangSii, H. K.H. K.SiiGroeseneken, GuidoGuidoGroesenekenDegraeve, RobinRobinDegraeve2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4971Degradation of oxides and oxynitrides under hot hole stressJournal article