Stiens, JohanJohanStiensRanson, WillyWillyRansonCottam, RonaldRonaldCottamDe Tandt, CathleenCathleenDe TandtVounckx, RogerRogerVounckxKotov, V.V.KotovShkerdin, G.G.ShkerdinDhoedt, BartBartDhoedtBaets, RoelRoelBaets2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1508Experimental characterization of reactive ion etched germanium diffraction gratings at 10.6 mmJournal article