Efficient Resonance Management in Ultrahigh-Q 1D Photonic Crystal Nanocavities Fabricated on 300 mm SOI CMOS Platform

Xie, WeiqiangWeiqiangXieVerheyen, PeterPeterVerheyenPantouvaki, MariannaMariannaPantouvakiVan Campenhout, JorisJorisVan CampenhoutVan Thourhout, DriesDriesVan Thourhout2022-03-022022-03-0220211863-8880WOS:000600934800001https://imec-publications.be/handle/20.500.12860/39233Efficient Resonance Management in Ultrahigh-Q 1D Photonic Crystal Nanocavities Fabricated on 300 mm SOI CMOS PlatformJournal article10.1002/lpor.202000317WOS:000600934800001DROP FILTERCOMPACT