MOCVD of Sr-containing oxides: transport properties and deposition mechanisms of the Sr(tmhd)(2)center dot pmdeta precursor

Bedoya, C.C.BedoyaCondorelli, G.G.G.G.CondorelliMotta, A.A.MottaMauro, A.A.MauroAnastasi, G.G.AnastasiFragala, I.L.I.L.FragalaLisoni, JuditJuditLisoniWouters, DirkDirkWouters2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10076MOCVD of Sr-containing oxides: transport properties and deposition mechanisms of the Sr(tmhd)(2)center dot pmdeta precursorJournal article