Mukherjee, K.K.MukherjeeDe Santi, C.C.De SantiYou, ShuzhenShuzhenYouGeens, KarenKarenGeensBorga, MatteoMatteoBorgaDecoutere, StefaanStefaanDecoutereBakeroot, BenoitBenoitBakerootDiehle, P.P.DiehleAltmann, F.F.AltmannMeneghesso, G.G.MeneghessoZanoni, E.E.ZanoniMeneghini, M.M.Meneghini2022-12-012022-07-292022-12-0120220003-6951WOS:000827448000008https://imec-publications.be/handle/20.500.12860/40182Study and characterization of GaN MOS capacitors: Planar vs trench topographiesJournal article10.1063/5.0087245WOS:000827448000008