Van Elshocht, SvenSvenVan ElshochtAdelmann, ChristophChristophAdelmannConard, ThierryThierryConardDelabie, AnneliesAnneliesDelabieFranquet, AlexisAlexisFranquetLehnen, PeerPeerLehnenNyns, LauraLauraNynsRichard, OlivierOlivierRichardSwerts, JohanJohanSwertsDe Gendt, StefanStefanDe Gendt2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/13047Thermal stability of rare earth oxides as high-k gate dielectricsProceedings paper