Study of ALD barrier layer for the embedding of electronic and opto-electronic components in a smart microystem in direct contact with the human body

Vanhaverbeke, CelineCelineVanhaverbeke2021-10-292021-10-292020-06https://imec-publications.be/handle/20.500.12860/36205Study of ALD barrier layer for the embedding of electronic and opto-electronic components in a smart microystem in direct contact with the human bodyPHD thesishttps://biblio.ugent.be/publication/8670116