Ohashi, TakeyoshiTakeyoshiOhashiAtsuko, YamaguchiYamaguchiAtsukoKobayashi, TakashiTakashiKobayashiInoue, OsamuOsamuInoueHasumi, KazuhisaKazuhisaHasumiIkota, MasamiMasamiIkotaTan, Chi LimChi LimTanVan den Bosch, GeertGeertVan den BoschLorusso, GianGianLorussoFurnemont, ArnaudArnaudFurnemont2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27089Precise measurement of thin film thickness in 3D-NAND device with CD-SEMOral presentation