Milenin, AlexeyAlexeyMileninDemand, MarcMarcDemandBoullart, WernerWernerBoullartArleo, PaulPaulArleo2021-10-202021-10-2020120013-4651https://imec-publications.be/handle/20.500.12860/21145Temperature and RF current sensor wafers for plasma etchingJournal article