The role of internal dislocation sources for the strain ralaxation of pseudomorphic SiGe/Si structures

Luysberg, MartinaMartinaLuysbergHueging, NorbertNorbertHuegingLenk, SteffiSteffiLenkBuca, DanDanBucaHollaender, BerndBerndHollaenderMantl, SiegfriedSiegfriedMantlMarcio, JJMarcioFichtner, PauloPauloFichtnerLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9237The role of internal dislocation sources for the strain ralaxation of pseudomorphic SiGe/Si structuresOral presentation