Delabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxGielis, SvenSvenGielisMaes, JanJanMaesNyns, LauraLauraNynsPopovici, Mihaela IoanaMihaela IoanaPopoviciSwerts, JohanJohanSwertsTielens, HildeHildeTielensJozef, PeetersPeetersJozefVan Elshocht, SvenSvenVan Elshocht2021-10-182021-10-1820101099-0062https://imec-publications.be/handle/20.500.12860/17003Ozone-based metal oxide atomic layer deposition: impact of N2/O2 supply ratio in ozone generationJournal article