Cho, W.W.ChoSaxena, R.R.SaxenaRodriguez, O.O.RodriguezAchanta, R.R.AchantaOjha, M.M.OjhaPlawsky, J.L.J.L.PlawskyGill, W.N.W.N.GillBaklanov, MikhaïlMikhaïlBaklanov2021-10-152021-10-152004-06https://imec-publications.be/handle/20.500.12860/8682Modification of nanoporous silica structures by fluorocarbon plasma treatmentProceedings paper