Lu, LuLuLuJourdan, NicolasNicolasJourdanDaubriac, RichardRichardDaubriacTabata, ToshiyukiToshiyukiTabataRoze, FabienFabienRozeThuries, LouisLouisThuriesCristiano, FuccioFuccioCristianoTokei, ZsoltZsoltTokei2023-12-182023-08-072023-12-1820232380-632XWOS:001027381700009https://imec-publications.be/handle/20.500.12860/42298Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free pathProceedings paper10.1109/IITC/MAM57687.2023.10154669979-8-3503-1097-9WOS:001027381700009