Luong, VuVuLuongPhilipsen, VickyVickyPhilipsenVerduijn, ErikErikVerduijnScholze, FrankFrankScholzeHendrickx, EricEricHendrickxHeyns, MarcMarcHeynsWood, ObertObertWood2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25586Modeling EUV mask using alternative materials for mask 3D effect compensationProceedings paperhttp://euvlsymposium.lbl.gov/proceedings/2015