Dendooven, JolienJolienDendoovenGoris, BartBartGorisDevloo-Casier, KilianKilianDevloo-CasierLevrau, ElisabethElisabethLevrauBiermans, EllenEllenBiermansBaklanov, MikhaïlMikhaïlBaklanovLudwig, KarlKarlLudwigVan Der Voort, PascalPascalVan Der VoortBals, SaraSaraBalsDetavernier, ChristopheChristopheDetavernier2021-10-202021-10-2020120897-4756https://imec-publications.be/handle/20.500.12860/20586Tuning the pore size of ink-bottle mesopores by atomic layer depositionJournal article