A PSQ-L polymer microring resonator fabricated by a simple UV-based soft-lithography process

Teng, JieJieTengScheerlinck, StijnStijnScheerlinckMorthier, GeertGeertMorthierBaets, RoelRoelBaets2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16298A PSQ-L polymer microring resonator fabricated by a simple UV-based soft-lithography processProceedings paper