Amorphous gadolinium aluminate as a dielectric and sulfur for indium phosphide passivation

van Dorp, DennisDennisvan DorpNyns, LauraLauraNynsCuypers, DanielDanielCuypersIvanov, TsvetanTsvetanIvanovBrizzi, SimoneSimoneBrizziTallarida, MassimoMassimoTallaridaFleischmann, ClaudiaClaudiaFleischmannHönicke, PhilippPhilippHönickeMüller, MatthiasMatthiasMüllerRichard, OlivierOlivierRichardSchmeisser, DieterDieterSchmeisserDe Gendt, StefanStefanDe GendtLin, DennisDennisLinAdelmann, ChristophChristophAdelmann2021-10-272021-10-2720192637-6113https://imec-publications.be/handle/20.500.12860/34212Amorphous gadolinium aluminate as a dielectric and sulfur for indium phosphide passivationJournal articlehttps://pubs.acs.org/doi/full/10.1021/acsaelm.9b00388