Photo-elastic characterization of defect structures in mono and multi-crystalline semiconductor materials

Herms, MartinMartinHermsWagner, MatthiasMatthiasWagnerKayser, StefanStefanKayserKießling, FrankFrankKießlingPoklad, AnnaAnnaPokladZhao, MingMingZhaoKretzer, UlrichUlrichKretzer2021-10-232021-10-232016-09https://imec-publications.be/handle/20.500.12860/26719Photo-elastic characterization of defect structures in mono and multi-crystalline semiconductor materialsMeeting abstract