Charge trapping in very thin high-permittivity gate dielectric layers

Houssa, MichelMichelHoussaStesmans, AndreAndreStesmansNaili, MohamedMohamedNailiHeyns, MarcMarcHeyns2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4438Charge trapping in very thin high-permittivity gate dielectric layersJournal article