Baravelli, EmanueleEmanueleBaravelliDixit, AbhisekAbhisekDixitRooyackers, RitaRitaRooyackersJurczak, GosiaGosiaJurczakSpeciale, NicoloNicoloSpecialeDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11692Impact of line-edge roughness on FinFET matching performanceJournal article