Optical spectroscopy of the density of gap states in ETP-deposited a-Si:H

Willekens, J.J.WillekensBrinza, M.M.BrinzaGungor, B.B.GungorAdriaenssens, G.J.G.J.AdriaenssensNesladek, MilosMilosNesladekKessels, W.M.M.W.M.M.KesselsSmets, A.H.M.A.H.M.SmetsVan de Sanden, M.C.M.M.C.M.Van de Sanden2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9920Optical spectroscopy of the density of gap states in ETP-deposited a-Si:HJournal article