EUV RLS performance tradeoffs for a polymer bound PAG resist process

Rathsack, BenBenRathsackHooge, JoshJoshHoogeSomervell, MarkMarkSomervellScheer, SteveSteveScheerNafus, KathleenKathleenNafusShite, HideoHideoShiteBradon, NeilNeilBradonKitano, JunichiJunichiKitanoGronheid, RoelRoelGronheidVaglio Pret, AlessandroAlessandroVaglio Pret2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16098EUV RLS performance tradeoffs for a polymer bound PAG resist processProceedings paper