Ultra-high density MEMS probe memory device

Heck, JohnJohnHeckAdams, DonaldDonaldAdamsBelov, NicolaiNicolaiBelovChou, T-K.A.T-K.A.ChouKim, B.B.KimKornelsen, KevinKevinKornelsenMa, Q.Q.MaRao, V.V.RaoSeveri, SimoneSimoneSeveriSpicer, DeanDeanSpicerTchelepi, G.G.TchelepiWitvrouw, AnnAnnWitvrouw2021-10-182021-10-1820100167-9317https://imec-publications.be/handle/20.500.12860/17239Ultra-high density MEMS probe memory deviceJournal article