Applying Machine Learning Models on Metrology Data for Predicting Device Electrical Performance

Dey, BappadityaBappadityaDeyAnh Tuan NgoSacchi, SaraSaraSacchiBlanco, VictorVictorBlancoLeray, PhilippePhilippeLerayHalder, SandipSandipHalder2025-04-132025-04-132025978-3-031-74639-01865-0929WOS:001437450900036https://imec-publications.be/handle/20.500.12860/45526Applying Machine Learning Models on Metrology Data for Predicting Device Electrical PerformanceProceedings paper10.1007/978-3-031-74640-6_36978-3-031-74640-6WOS:001437450900036