Operation of a Cameca IMS-4f at reduced extraction energies

Vandervorst, WilfriedWilfriedVandervorstGeenen, LucLucGeenenElst, KathyKathyElstDe Bisschop, PeterPeterDe Bisschop2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/420Operation of a Cameca IMS-4f at reduced extraction energiesProceedings paper