Eneman, GeertGeertEnemanVerheyen, PeterPeterVerheyenDe Keersgieter, AnAnDe KeersgieterJurczak, GosiaGosiaJurczakDe Meyer, KristinKristinDe Meyer2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12125Scalability of stress induced by contact-etch-stop layers: a simulation studyJournal article