Laser ablation as an enabling technology for the structuring of optical multilayer structures

Hendrickx, NinaNinaHendrickxVan Steenberge, GeertGeertVan SteenbergeGeerinck, PeterPeterGeerinckVan Daele, PeterPeterVan Daele2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10576Laser ablation as an enabling technology for the structuring of optical multilayer structuresProceedings paper