Khaled, AhmadAhmadKhaledRaoof, MoatassimMoatassimRaoofCherman, VladimirVladimirChermanAbbas, MohamedMohamedAbbasDe Wolf, IngridIngridDe WolfWitvrouw, AnnAnnWitvrouw2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20926SiGe double clamped beam MEM resonators for DNA sensingProceedings paper