Relation between Raman frequency and stress in Si for surface and cross-section experiments in microelectronics components

De Wolf, IngridIngridDe Wolf2021-10-222021-10-2220150021-8979https://imec-publications.be/handle/20.500.12860/25159Relation between Raman frequency and stress in Si for surface and cross-section experiments in microelectronics componentsJournal article10.1063/1.4927133http://dx.doi.org/10.1063/1.4927133