A capacitive humidity sensor using a positive photosensitive polymer

Pham, NgaNgaPhamCherman, VladimirVladimirChermanDuval, FabriceFabriceDuvalSabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanJansen, RoelofRoelofJansenTilmans, HarrieHarrieTilmans2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17803A capacitive humidity sensor using a positive photosensitive polymerProceedings paper