Thick high quality GaN layers grown on 200mm Si(111) substrates by MOVPE

Cheng, KaiKaiChengWestwater, SimonSimonWestwaterLeys, MaartenMaartenLeysDekoster, JohanJohanDekosterdel Agua Borniquel, Jose IgnacioJose Ignaciodel Agua BorniquelJun, S.W.S.W.JunBour, D.P.D.P.Bour2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18674Thick high quality GaN layers grown on 200mm Si(111) substrates by MOVPEOral presentation