Mertens, PaulPaulMertensMcGeary, M. J.M. J.McGearySchaekers, MarcMarcSchaekersSprey, HesselHesselSpreyVermeire, BertBertVermeireDepas, MichelMichelDepasMeuris, MarcMarcMeurisHeyns, MarcMarcHeyns2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2021Effect of Cl in gate oxidationProceedings paper