Deep-level transient spectroscopy of MOS capacitors on GeSn epitaxial layers

Simoen, EddyEddySimoenVincent, BenjaminBenjaminVincentMerckling, ClementClementMercklingGencarelli, FedericaFedericaGencarelliChu, L-KL-KChuLoo, RogerRogerLoo2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21518Deep-level transient spectroscopy of MOS capacitors on GeSn epitaxial layersMeeting abstract