Van den berg, PimPimVan den bergVan Look, LieveLieveVan LookVan Swaaij, GijsGijsVan SwaaijVan Rhee, TasjaTasjaVan RheeSchiffelers, GuidoGuidoSchiffelersGielis, JoostJoostGielis2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/34192A new concept to qualify pattern shift on EUV scannersOral presentationhttps://www.vde.com/resource/blob/1872556/5ace29db71f7514c625d5e65bd659247/program-schedule-emlc2019-data.pdf