Monaghan, M. L.M. L.MonaghanNigam, TanyaTanyaNigamHoussa, MichelMichelHoussaDe Gendt, StefanStefanDe GendtUrbach, H. P.H. P.UrbachDe Bokx, P. K.P. K.De Bokx2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4593Characterization of silicon oxynitride films by grazing-emission X-ray fluorescence spectrometryJournal article