High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platform

Vermeulen, DiedrikDiedrikVermeulenSelvaraja, ShankarShankarSelvarajaVerheyen, PeterPeterVerheyenLepage, GuyGuyLepageBogaerts, WimWimBogaertsAbsil, PhilippePhilippeAbsilVan Thourhout, DriesDriesVan ThourhoutRoelkens, GuntherGuntherRoelkens2021-10-182021-10-1820101094-4087https://imec-publications.be/handle/20.500.12860/18291High-efficiency fiber-to-chip grating couplers realized using an advanced CMOS-compatible silicon-on-insulator platformJournal article