Van Bavel, MiekeMiekeVan BavelIacopi, FrancescaFrancescaIacopiBaklanov, MikhaïlMikhaïlBaklanovMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9706Low-k dielectrics: spin-on or CVD?Journal article