Armini, SilviaSilviaArminiWhelan, CarolineCarolineWhelanMoinpour, MansourMansourMoinpourMaex, KarenKarenMaex2021-10-172021-10-1720090013-4651https://imec-publications.be/handle/20.500.12860/14909Copper CMP with composite polymer core - silica shell abrasives: A defectivity studyJournal article