Charpin-Nicolle, C.C.Charpin-NicolleChiaroni, J.J.ChiaroniLe Cunff, Y.Y.Le CunffDenis, H.H.DenisRochat, N.N.RochatVillani, M. L.M. L.VillaniMassin, J.J.MassinIrmscher, M.M.IrmscherVratzov, B.B.Vratzovvan Hossen, H.H.van HossenGubbini, P.P.GubbiniLorusso, GianGianLorussoVan Den Heuvel, DieterDieterVan Den Heuvel2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13500Integration issues in step and repeat UV nanoimprint lithographyOral presentation