Enhanced sensitivity of silicon-on-insulator surface plasmon interferometer with additional silicon layer

Le, Khai Q.Khai Q.LeBienstman, PeterPeterBienstman2021-10-192021-10-192011-061943-0655https://imec-publications.be/handle/20.500.12860/19257Enhanced sensitivity of silicon-on-insulator surface plasmon interferometer with additional silicon layerJournal article