Satta, AlessandraAlessandraSattaSimoen, EddyEddySimoenClarysse, TrudoTrudoClarysseJanssens, TomTomJanssensBenedetti, AlessandroAlessandroBenedettiDe Jaeger, BriceBriceDe JaegerMeuris, MarcMarcMeurisVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11166Diffusion, activation and recrystallization of boron implanted in preamorphized and crystalline germaniumJournal article