UV photonic integrated circuits for far-field structured illumination autofluorescence microscopy

Lin, ChupaoChupaoLinPenaranda, Juan Santo DomingoJuan Santo DomingoPenarandaDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernierSchaubroeck, DavidDavidSchaubroeckBoon, NicoNicoBoonBaets, RoelRoelBaetsLe Thomas, NicolasNicolasLe Thomas2022-11-032022-08-102022-11-0320222041-1723WOS:000831732000013https://imec-publications.be/handle/20.500.12860/40236UV photonic integrated circuits for far-field structured illumination autofluorescence microscopyJournal article10.1038/s41467-022-31989-8WOS:000831732000013SILICON-NITRIDERESOLUTIONLIMITMEDLINE:35896536