Schaekers, MarcMarcSchaekersTokei, ZsoltZsoltTokeiLi, Yong-LiYong-LiLiCarbonell, LaureLaureCarbonell2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12845Barrier deposition for advanced interconnectsProceedings paper