First demonstration of monocrystalline silicon macaroni channel for 3-D NAND memory devices

Delhougne, RomainRomainDelhougneArreghini, AntonioAntonioArreghiniRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyVecchio, EmmaEmmaVecchioZhang, LipingLipingZhangPak, MuratMuratPakNyns, LauraLauraNynsRaymaekers, TomTomRaymaekersJossart, NicoNicoJossartBreuil, LaurentLaurentBreuilVadakupudhu Palayam, SenthilSenthilVadakupudhu PalayamTan, ChiLimChiLimTanVan den Bosch, GeertGeertVan den BoschFurnemont, ArnaudArnaudFurnemont2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30588First demonstration of monocrystalline silicon macaroni channel for 3-D NAND memory devicesProceedings paperhttps://ieeexplore.ieee.org/document/8510635