Rochus, VeroniqueVeroniqueRochusErismis, Mehmet AkifMehmet AkifErismisJansen, RoelofRoelofJansenFarghaly, MahmoudMahmoudFarghalyAl-Moghazy, MohamedMohamedAl-MoghazyRay Chaudhuri, AsheshAsheshRay ChaudhuriHelin, PhilippePhilippeHelinSeveri, SimoneSimoneSeveriRanvier, SylvainSylvainRanvierLamy, HervéHervéLamyRochus, PierrePierreRochusWitvrouw, AnnAnnWitvrouwTilmans, HarrieHarrieTilmansRottenberg, XavierXavierRottenberg2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21400MEMS sensors for application in pico-satellitesProceedings paper