Verification of 2D SRP by the Analysis of Known Lateral Profiles

Vandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseCaymax, MattyMattyCaymaxPrivitera, VittorioVittorioPrivitera2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/963Verification of 2D SRP by the Analysis of Known Lateral ProfilesOral presentation